Control of frictional force on coating films of boron nitride-copper complex in ultra high vacuum

Thin Solid Films

Volumn 405, Issue 1-2, 2002, Pages 300-303

  Goto, Masahiro ^a   Kasahara, Akira ^a   Tosa, Masahiro ^a   Yoshihara, Kazuhiro ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

Boron nitride; Frictional force; Magnetron co sputter; Surface energy; Ultra high vacuum

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; BORIDE COATINGS; BORON COMPOUNDS; CONTACT ANGLE; COPPER; FILM PREPARATION; FRICTION; INTERFACIAL ENERGY; MAGNETRON SPUTTERING; ULTRAHIGH VACUUM;

BORON NITRIDE-COPPER COMPLEXES; COATING FILMS;

THIN FILMS;

EID: 0037154904     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(01)01727-8     Document Type: Article

References (5)