Study of plasma parameters in a BAI 730 M triode ion plating system by means of a Langmuir probe and plasma mass and energy spectroscopy

Surface and Coatings Technology

Volumn 135, Issue 2-3, 2001, Pages 208-220

  Maček, Marijan ^a,b   Navinšek, Boris ^b   Panjan, Peter ^b   Kadlec, Stanislav ^c  

^a UNIVERSITY OF LJUBLJANA   (Slovenia)

^b JO EF STEFAN INSTITUTE   (Slovenia)

^c INSTITUTE OF PHYSICS   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

CHROMIUM COMPOUNDS; CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC CURRENT MEASUREMENT; PLASMA DENSITY; SPECTROSCOPIC ANALYSIS; TITANIUM NITRIDE; TRIODES; VAPOR DEPOSITION; VOLTAGE MEASUREMENT;

ENERGY RESOLVED SPECTROSCOPY; LANGMUIR PROBE; TRIODE ION PLATING SYSTEMS;

PROTECTIVE COATINGS;

COATING; CORROSION RESISTANCE; HARDNESS; PLASMA TREATMENT; VAPOR DEPOSITION;

EID: 0034745892     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(00)00998-1     Document Type: Article

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