Raman analysis of laser annealed nitrogen doped amorphous carbon film

Solid State Communications

Volumn 123, Issue 3-4, 2002, Pages 97-100

  Zhang, Weili ^a   Xia, Yiben ^a   Ju, Jianhua ^a   Fan, Yimin ^a   Fang, Zhijun ^a   Wang, Linjun ^a   Wang, Zhiming ^a  

^a SHANGHAI UNIVERSITY   (China)

Author keywords

A. a C H(N) film; Amorphous C film; Laser annealing; Raman spectrum; Thermal stability

Indexed keywords

ANNEALING; CARBON; DOPING (ADDITIVES); HYDROGEN BONDS; LASERS; NITROGEN; RAMAN SPECTROSCOPY; SPECTROMETERS; SPECTRUM ANALYSIS; THERMODYNAMIC STABILITY;

AMORPHOUS CARBON FILMS;

AMORPHOUS FILMS;

EID: 0036645833     PISSN: 00381098     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0038-1098(02)00237-5     Document Type: Article

References (10)