Sputtering of metals by heavy ions in the inelastic energy loss range

Vacuum

Volumn 66, Issue 2, 2002, Pages 133-136

  Cheblukov, Y N ^a   Didyk, A Y ^b   Halil, A ^b   Semina, V K ^b   Stepanov, A E ^a   Suvorov, A L ^a   Vasiliev, N A ^a  

^a INSTITUTE FOR THEORETICAL AND EXPERIMENTAL PHYSICS   (Russian Federation)

^b JOINT INSTITUTE FOR NUCLEAR RESEARCH   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL STRUCTURE; ENERGY DISSIPATION; ION IMPLANTATION; IRRADIATION; PARTICLE ACCELERATORS; SPUTTERING;

INELASTIC ENERGY LOSS;

HEAVY IONS;

EID: 0036644794     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(02)00109-4     Document Type: Article

References (9)