Measuring sputtering yields of high energy heavy ions on metals

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 146, Issue 1-4, 1998, Pages 162-171

  Mieskes, H D ^a   Assmann, W ^a   Brodale, M ^a   Dobler, M ^b   Gluckler H ^c   Hartung, P ^d   Stenzel, P ^e  

^a UNIVERSITY OF MUNICH   (Germany)

^b INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

^c PAUL SCHERRER INSTITUTE   (Switzerland)

^d Maier Leibnitz Laboratorium   (Germany)

^e GeMeTec   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

GOLD; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SPUTTERING; SURFACE CLEANING; TITANIUM; ZIRCONIUM;

TOTAL REFLECTION X RAY FLUORESCENCE;

HEAVY IONS;

EID: 0032477026     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(98)00444-3     Document Type: Article

References (18)

1. R. Behrisch, K. Wittmaack (Eds.), Sputtering by Particle Bombardment III, Topics in Applied Physics, vol. 64, Springer, Berlin, 1991.
2. P. Sigmund, Nucl. Instr. and Meth. B 27 (1987) 1.
3. J.P. Biersack, L.G. Haggmark, Nucl. Instr. and Meth. 147 (1980) 257.
4. J. Lindner, Nucl. Instr. and Meth. B 84 (1994) 153.
5. L.E. Seiberling, C.K. Meins, B.H. Cooper, J.E. Griffith, M.H. Mendenhall, T.A. Tombrello, Nucl. Instr. and Meth. 198 (1982) 17.
6. K. Wien, Nucl. Instr. and Meth. B 65 (1992) 149.
7. H. Dammak, A. Dunlop, D. Lesueur, A. Brunelle, S. Della-Negra, Y. LeBeyec, Phys. Rev. Lett. 74 (1995) 1135.
8. R. Behrisch, Ergeb. Exakten Naturwiss. 35 (1964) 295.
9. VAb Vakuum-Anlagenbau, D-25337 Elmshorn, Germany.
10. Leybold Hereaus, Köln, Germany.
11. Atom Tech Ltd., West Molesey, Surrey, UK.
12. R. Yu, T. Gustafsson, Surf. Sci. 177 (1986) L987.
13. W. Assmann, P. Hartung, H. Huber, P. Staat, H. Steffens, Ch. Steinhausen, Nucl. Instr. and Meth. B 85 (1994) 726.
14. A.M. Behrooz, R.L. Headrick, L.E. Seiberling, R.W. Zurmühle, Nucl. Instr. and Meth. B 28 (1987) 108.
15. A. Bergmaier, G. Dollinger, C.M. Frey, Nucl. Instr. and Meth. B 99 (1995) 488.
16. B. Emmoth, H. Bergsaker, Nucl. Instr. and Meth. B 33 (1988) 435.
17. B.L. Doyle, J.A. Knapp, D.L. Buller, Nucl. Instr. and Meth. B 42 (1989) 295.
18. G. Dollinger, P. Maier-Komor, Nucl. Instr. and Meth. A 303 (1991) 50.