High-density selective placement methods for carbon nanotubes

Microelectronic Engineering

Volumn 61-62, Issue , 2002, Pages 491-496

  Valentin, Emmanuel ^a   Auvray, Stephane ^b   Goethals, Julie ^a   Lewenstein, Justin ^c   Capes, Laurence ^a   Filoramo, Arianna ^a   Ribayrol, Aline ^a   Tsui, Ray ^c   Bourgoin, Jean Philippe ^b   Patillon, Jean Noel ^a  

^a Motorola Labs   (France)

^b CEA SACLAY   (France)

^c MOTOROLA INC   (United States)

Author keywords

Carbon nanotubes; High density; NMP; Selective placement

Indexed keywords

AMINES; ATOMIC FORCE MICROSCOPY; DISPERSIONS; ELECTRIC PROPERTIES; ELECTRON BEAM LITHOGRAPHY; ELLIPSOMETRY; LASER ABLATION; MICROELECTRONICS; MONOLAYERS; OPTIMIZATION; ORGANIC SOLVENTS; SELF ASSEMBLY; SILANES; SURFACE ACTIVE AGENTS; SURFACE PROPERTIES;

SELECTIVE PLACEMENTS;

CARBON NANOTUBES;

EID: 0036643804     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(02)00580-4     Document Type: Conference Paper

References (8)