Nanostructures of pyramidal shape, technology and applications

Microelectronic Engineering

Volumn 61-62, Issue , 2002, Pages 675-680

  Kleps, Irina ^a   Angelescu, Anca ^a   Avram, Marioara ^a   Miu, Mihaela ^a   Simion, Monica ^a  

^a NATIONAL INSTITUTE FOR RESEARCH AND DEVELOPMENT IN MICROTECHNOLOGIES   (Romania)

Author keywords

Micromachining; Pyramidal nanostructures; Silicon nanoelectrodes; Tips

Indexed keywords

CYCLIC VOLTAMMETRY; DIELECTRIC MATERIALS; DRY ETCHING; MICROMACHINING; PHOTOLITHOGRAPHY; SYNTHESIS (CHEMICAL); THIN FILMS;

PYRAMIDAL NANOSTRUCTURES;

NANOSTRUCTURED MATERIALS;

EID: 0036643792     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(02)00502-6     Document Type: Conference Paper

References (12)

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9. Field emitter arrays technologies and materials