High temperature plasma based ionic implantation of titanium alloys and silicon

Surface and Coatings Technology

Volumn 156, Issue 1-3, 2002, Pages 155-158

  Marot, L ^a   Drouet, M ^a   Berneau, F ^a   Straboni, A ^a  

^a UNIVERSITÉ DE POITIERS   (France)

Author keywords

High temperature; Nitriding; Plasma based ion implantation; Silicon; Titanium

Indexed keywords

DIFFUSION; HIGH TEMPERATURE OPERATIONS; NITRIDING; PLASMAS; SILICON; TITANIUM ALLOYS;

PLASMA BASED ION IMPLANTATION (PBII);

ION IMPLANTATION;

PLASMA TREATMENT;

EID: 0036641043     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(02)00120-2     Document Type: Article

References (7)