New line of high voltage high current pulse generators for plasma-based ion implantation

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 2, 1999, Pages 879-882

  Maulat, O ^a  

^a Physique and Industrie   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 22644451087     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590655     Document Type: Article

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