A hot implantation study on the evolution of defects in He ion implanted MgO(1 0 0)

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 191, Issue 1-4, 2002, Pages 452-455

  Fedorov, A V ^a   Van Huis, M A ^a   Van Veen, A ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

He ion implantation; MgO; Thermal desorption

Indexed keywords

ACTIVATION ENERGY; CRYSTAL DEFECTS; DOPPLER EFFECT; HELIUM; MAGNESIA; NUCLEATION; POSITRONS; SPECTROSCOPIC ANALYSIS; THERMODYNAMIC STABILITY;

HOT IMPLANTATION;

ION IMPLANTATION;

EID: 0036574544     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(02)00591-8     Document Type: Conference Paper

References (6)