Carrier control in transparent semiconducting oxide thin films by ion implantation: MgIn2O4 and ZnO

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 191, Issue 1-4, 2002, Pages 173-177

  Miyakawa, M ^a   Ueda, K ^a   Hosono, H ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Carrier doping; Ion implantation; Transparent oxides

Indexed keywords

CHARGE CARRIERS; ELECTRIC CONDUCTIVITY; ELECTRONS; HIGH TEMPERATURE EFFECTS; ION IMPLANTATION; PULSED LASER DEPOSITION; SEMICONDUCTING FILMS; SEMICONDUCTOR DOPING; ZINC OXIDE;

CARRIER DOPING;

THIN FILMS;

EID: 0036573735     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(02)00550-5     Document Type: Conference Paper

References (11)