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Volumn 190, Issue 1-4, 2002, Pages 335-338
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Ion beam induced charge characterisation of a silicon microdosimeter using a heavy ion microprobe
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Author keywords
IBIC; Microdosimetry; Microprobe
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Indexed keywords
ARRAYS;
CHARACTERIZATION;
DOSIMETERS;
HEAVY IONS;
IMAGING TECHNIQUES;
SEMICONDUCTOR DIODES;
SEMICONDUCTOR JUNCTIONS;
HEAVY ION MICROPROBES;
ION BEAMS;
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EID: 0036569187
PISSN: 0168583X
EISSN: None
Source Type: Journal
DOI: 10.1016/S0168-583X(01)01316-7 Document Type: Conference Paper |
Times cited : (19)
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References (8)
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