Hydrogen analysis of CVD homoepitaxial diamond films by high-resolution elastic recoil detection

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 190, Issue 1-4, 2002, Pages 689-692

  Kimura, K ^a   Nakajima, K ^a   Yamanaka, S ^b   Hasegawa, M ^b   Okushi, H ^b  

^a KYOTO UNIVERSITY   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

CVD diamond; High resolution ERD; Hydrogen

Indexed keywords

ANNEALING; CHEMICAL VAPOR DEPOSITION; DOPING (ADDITIVES); HYDROGEN; SPECTROMETERS; SURFACE CHEMISTRY;

HIGH-RESOLUTION ELASTIC RECOIL DETECTION;

DIAMOND FILMS;

EID: 0036568912     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(02)00450-0     Document Type: Conference Paper

References (12)