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Semiconductor Science and Technology

Volumn 17, Issue 5, 2002, Pages 421-426

Dynamics of interface traps in bonded silicon wafers

(3) Khorasani, Sina a Motieifar, Alireza a Rashidian, Bizhan a

a SHARIF UNIVERSITY OF TECHNOLOGY (Iran)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; CAPACITANCE; ELECTRIC CONDUCTIVITY; ELECTRON TRAPS; EQUIVALENT CIRCUITS; MATHEMATICAL MODELS; SILICON WAFERS; THERMIONIC EMISSION; TIME DOMAIN ANALYSIS;

WAFER BONDING;

QUANTUM THEORY;

EID: 0036567222 PISSN: 02681242 EISSN: None Source Type: Journal
DOI: 10.1117/12.444987 Document Type: Article

Times cited : (12)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.