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Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 20, Issue 3, 2002, Pages 1076-1078

Control of dielectric cap induced band-gap shift in 1.55 μm laser structures

(4) Wojcik, J a Robinson, B J a Thompson, D A a Mascher, P a

a MCMASTER UNIVERSITY (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC MATERIALS; ELECTRON CYCLOTRON RESONANCE; ENERGY GAP; LIGHT EMISSION; PHOTOLUMINESCENCE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAPID THERMAL ANNEALING; REFRACTIVE INDEX; SEMICONDUCTING SILICON COMPOUNDS; TEMPERATURE CONTROL; THICKNESS MEASUREMENT;

DIELECTRIC CAP; MICROWAVE POWER; SILICON OXYNITRIDE;

QUANTUM WELL LASERS;

EID: 0036565325 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.1463074 Document Type: Article

Times cited : (6)

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