Application of in situ ellipsometry in the fabrication of thin-film optical coatings on semiconductors

Applied Optics

Volumn 39, Issue 6, 2000, Pages 1053-1058

  Boudreau, Marcel G ^a,b   Wallace, Steven G ^a   Balcaitis, Ginutis ^a   Murugkar, Sangeeta ^a,c   Haugen, Harold K ^a   Mascher, Peter ^a  

^a MCMASTER UNIVERSITY   (Canada)

^b NORTEL NETWORKS   (Canada)

^c JDS UNIPHASE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0005909483     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.39.001053     Document Type: Article

References (15)

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