CMOS-compatible planar silicon waveguide-grating-coupler photodetectors fabricated on silicon-on-insulator (SOI) substrates

IEEE Journal of Quantum Electronics

Volumn 38, Issue 5, 2002, Pages 477-480

  Csutak, S M ^a,b   Dakshina Murthy, S ^c   Campbell, Joe C ^a  

^a The University of Texas at Austin   (United States)

^b MOTOROLA INC   (United States)

^c ADVANCED MICRO DEVICES   (United States)

Author keywords

Grating coupler; Optical receivers; Optoelectronic integrated circuits; P i n photodiode; Photodetector; Silicon photodetector

Indexed keywords

CMOS INTEGRATED CIRCUITS; INTEGRATED OPTOELECTRONICS; OPTICAL COMMUNICATION EQUIPMENT; PHOTODIODES; QUANTUM EFFICIENCY; SEMICONDUCTING SILICON; SILICON ON INSULATOR TECHNOLOGY; SUBSTRATES; WAVEGUIDE COUPLERS;

GRATING COUPLER; OPTICAL RECEIVERS; SILICON PHOTODETECTOR;

PHOTODETECTORS;

EID: 0036565323     PISSN: 00189197     EISSN: None     Source Type: Journal    
DOI: 10.1109/3.998619     Document Type: Article

References (10)

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