High-temperature gas sensor using perovskite thin films on a suspended microheater

Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 20, Issue 3, 2002, Pages 1100-1104

  Grudin, O ^a   Marinescu, R ^a   Landsberger, L M ^a   Kahrizi, M ^a   Frolov, G ^a   Cheeke, J D N ^a   Chehab, S ^b   Post, M ^b   Tunney, J ^b   Du, X ^b   Yang, D ^b   Segall, D ^c  

^a Gina Cody School of Engineering and Computer Science   (Canada)

^b NATIONAL RESEARCH COUNCIL CANADA   (Canada)

^c Armstrong Monitoring Corporation   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; HEATING EQUIPMENT; HIGH TEMPERATURE ENGINEERING; MOS DEVICES; POLYSILICON; PULSED LASER DEPOSITION; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE STRUCTURES; THIN FILM DEVICES; X RAY DIFFRACTION ANALYSIS;

HIGH TEMPERATURE GAS SENSOR; INDUCTIVELY COUPLED PLASMA AUGER ELECTRON SPECTROSCOPY; PEROVSKITE THIN FILMS; SENSOR RESPONSE SENSITIVITY; SUSPENDED MICROHEATER;

CHEMICAL SENSORS;

EID: 0036565116     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1463072     Document Type: Article

References (11)