The effect of heat treatment on the optical properties of Ta2O5 films

Journal of Optical Technology (A Translation of Opticheskii Zhurnal)

Volumn 69, Issue 5, 2002, Pages 319-321

  Vol'pyan, O D ^a   Yakovlev, P P ^a  

^a OOO Fotron Avto   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; DISPERSIONS; HEAT TREATMENT; ION BEAMS; REFRACTIVE INDEX; SPUTTERING; TANTALUM COMPOUNDS;

OPTICAL LOSSES;

OPTICAL FILMS;

EID: 0036564162     PISSN: 10709762     EISSN: None     Source Type: Journal    
DOI: 10.1364/JOT.69.000319     Document Type: Article

References (12)

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3. Versatile multipass reflectometer for precise measurement of high reflectance mirror
4. 5 for optical interference coating
5. Properties of films obtained by ion-beam sputtering
6. 5 films obtained by magnetron sputtering
7. 2 atmosphere
8. Structure, optical and electrical properties of mixed dielectric films
9. Highly reflective mirrors based on refractory oxides for high-powersolid-state near-IR lasers
10. 5 films
11. Optical properties of molybdenum oxide films