Piezoelectric and electrical properties of PZT-PSN thin film ceramics for MEMS applications

Materials Science in Semiconductor Processing

Volumn 5, Issue 2-3, 2002, Pages 115-121

  Kim, Seong Kon ^a   Kim, Cheol Su ^a   Lee, Kyung Wha ^a   Lee, Sang Yeol ^a  

^a Yonsei University   (South Korea)

Author keywords

Electromechanical coupling coefficient; Mechanical quality factor; MEMS; Pulsed laser deposition; PZT PSN

Indexed keywords

CALCINATION; CERAMIC MATERIALS; GRAIN SIZE AND SHAPE; MICROELECTROMECHANICAL DEVICES; NEODYMIUM LASERS; PIEZOELECTRIC MATERIALS; SINTERING;

ELECTROCHEMICAL COUPLING;

THIN FILMS;

EID: 0036557665     PISSN: 13698001     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1369-8001(02)00091-4     Document Type: Conference Paper

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