Buried interfaces of heat-loaded Mo/Si multilayers studied by soft-x-ray emission spectroscopy

Surface Review and Letters

Volumn 9, Issue 2, 2002, Pages 663-667

  Miyata, N ^a   Imazono, T ^a   Ishikawa, S ^a   Arai, A ^a   Yanagihara, M ^a   Watanabe, M ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

MOLYBDENUM; SILICON;

CONFERENCE PAPER; DIFFUSION COEFFICIENT; ROENTGEN SPECTROSCOPY; SURFACE PROPERTY; THERMOSTABILITY; THICKNESS; X RAY DIFFRACTION;

EID: 0036553507     PISSN: 0218625X     EISSN: None     Source Type: Journal    
DOI: 10.1142/S0218625X0200283X     Document Type: Conference Paper

References (15)