Synchrotron radiation photoemission and infrared spectroscopy study of adsorption and decomposition of dichlorosilane on Si(100)(2 x 1)

Surface Review and Letters

Volumn 9, Issue 2, 2002, Pages 803-808

  Kamakura, Nozomu ^a   Shinohara, Masanori ^a   Watanabe, Hayato ^a   Kuwano, Takayuki ^a   Seyama, Akio ^a   Kimura, Yasuo ^a   Niwano, Michio ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHLORIDE; DICHLOROSILANE; SILANE DERIVATIVE; SILICON; UNCLASSIFIED DRUG;

ADSORPTION; CHEMICAL BOND; CONFERENCE PAPER; DECOMPOSITION; INFRARED SPECTROSCOPY; MEASUREMENT; MOLECULE; ROOM TEMPERATURE; SYNCHROTRON RADIATION; VIBRATION;

EID: 0036552229     PISSN: 0218625X     EISSN: None     Source Type: Journal    
DOI: 10.1142/S0218625X02003019     Document Type: Conference Paper

References (21)