Long-life micro-laser encoder

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2000, Pages 491-495

  Sawada, Renshi ^a   Higurashi, Eiji ^a   Ohguchi, Osamu ^a   Jin, Yoshito ^a  

^a NTT CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; ENCODING (SYMBOLS); MICROPROCESSOR CHIPS; MICROSENSORS; OPTICAL WAVEGUIDES; PHOTODIODES; SEMICONDUCTING INDIUM PHOSPHIDE; SEMICONDUCTING SILICON; SEMICONDUCTOR LASERS;

MICRO-LASER ENCODER;

MICROELECTROMECHANICAL DEVICES;

EID: 0033724452     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (5)