Device-level simulation of wave propagation along metal-insulator-semiconductor interconnects

IEEE Transactions on Microwave Theory and Techniques

Volumn 50, Issue 4, 2002, Pages 1127-1136

  Wang, Gaofeng ^a,b,c,d   Dutton, Robert W ^a,b   Rafferty, Conor S ^a,e,f  

^a IEEE   (United States)

^b Stanford University   (United States)

^c Intpax Inc   (United States)

^d WUHAN UNIVERSITY   (China)

^e LUCENT TECHNOLOGIES   (United States)

^f AGERE SYSTEMS   (United States)

Author keywords

Boundary layer problem; Device level simulation; Electromagnetic analysis; Field carrier interactions; Finite element method; MIS interconnects; Semiconductor nonlinearity and loss; Slow wave effect

Indexed keywords

BOUNDARY LAYER PROBLEM; DEVICE LEVEL SIMULATION; ELECTROMAGNETIC ANALYSIS; FIELD CARRIER INTERACTIONS; METAL INSULATOR SEMICONDUCTOR INTERCONNECTS; SEMICONDUCTOR NONLINEARITY; SLOW WAVE EFFECT;

BOUNDARY LAYERS; CHARGE CARRIERS; COMPUTER SIMULATION; CONVERGENCE OF NUMERICAL METHODS; EQUATIONS OF MOTION; FINITE ELEMENT METHOD; FREQUENCY DOMAIN ANALYSIS; INTERCONNECTION NETWORKS; ITERATIVE METHODS; MAXWELL EQUATIONS; NONLINEAR EQUATIONS; WAVE PROPAGATION;

MIS DEVICES;

EID: 0036540101     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/22.993416     Document Type: Article

References (26)

1. Microstrip transmission on semiconductor dielectrics
2. A parallel-plate wave-guide approach to micro-miniaturized planar transmission lines for integrated circuits
3. 2 system
4. A high-frequency variable delay line
5. Microwave properties of nonlinear MIS and Schottky-barrier microstrip
6. Analytical model of the Schottky contact coplanar line
7. Modeling the substrate effect in interconnect line characteristics of high-speed VLSI circuits
8. Analysis of slow-wave coplanar waveguide for monolithic integrated circuits
9. Characteristics of metal-insulator-semiconductor coplanar waveguide for monolithic microwave circuits
10. A generalized method for deriving the space-domain Green's function in a shielded, multilayer substrate structure with applications to MIS transmission lines
11. MIS slow-wave structures over a wide range of parameters
12. Analysis of slow-wave transmission lines on multi-layered semiconductor structures including conductor loss
13. Hybrid-mode analysis of homogeneously and inhomogeneously doped low-loss slow-wave coplanar transmission lines
14. Rigorous analysis of mode propagation and field scattering in silicon-based coplanar MIS slow wave structures with abrupt transitions to transmission lines on normal substrate
15. Characterization of MIS structure coplanar transmission lines for investigation of signal propagation in integrated circuits
16. Finite element analysis of lossy waveguide-Applications to microstrip lines on semiconductor substrate
17. Finite element analysis of slow-wave Schottky contact printed lines
18. Propagation in layered biased semiconductor structures based on transport analysis
19. Space-charge wave considerations in MIS waveguide analysis
20. Elimination of vector parasites in finite element Maxwell solutions
21. Metal-insulator-semiconductor transmission lines
22. Coupled electromagnetic and device level investigations of metal-insulator-semiconductor interconnects