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Volumn 46, Issue 4, 2002, Pages 505-512
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Determination of semiconductor resistance under a contact
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Author keywords
[No Author keywords available]
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Indexed keywords
ELECTRIC CONDUCTIVITY;
ELECTRIC RESISTANCE;
PROBES;
SEMICONDUCTING FILMS;
TRANSMISSION LINE THEORY;
CONTACT PADS;
SEMICONDUCTOR RESISTANCE;
ELECTRIC CONTACTS;
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EID: 0036533111
PISSN: 00381101
EISSN: None
Source Type: Journal
DOI: 10.1016/S0038-1101(01)00286-6 Document Type: Article |
Times cited : (9)
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References (15)
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