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Journal of the Electrochemical Society

Volumn 149, Issue 4, 2002, Pages

Fabrication of high performance low-temperature poly-Si thin-film transistors using a modulated process

(2) Fan, Ching Lin a Chen, Mao Chieh a

a NATIONAL CHIAO TUNG UNIVERSITY (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

AMMONIA; AMORPHOUS SILICON; ANNEALING; CRYSTALLIZATION; GRAIN SIZE AND SHAPE; PASSIVATION; PHASE TRANSITIONS; PLASMA ETCHING; POLYSILICON; REACTIVE ION ETCHING; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR JUNCTIONS;

CHANNEL REGIONS; CONVENTIONAL PROCESS; ELECTRICAL STRESS INDUCED DEGRADATION; IMPLANT ANNEALING; MODULATED PROCESS; PLASMA PASSIVATION EFFICIENCY; SOLID PHASE CRYSTALLIZATION;

THIN FILM TRANSISTORS;

EID: 0036531269 PISSN: 00134651 EISSN: None Source Type: Journal
DOI: 10.1149/1.1452123 Document Type: Article

Times cited : (7)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.