Growth of high-quality homoepitaxial diamond films by HF-CVD

Diamond and Related Materials

Volumn 11, Issue 3-6, 2002, Pages 504-508

  Stammler, M ^a   Eisenbeiss H ^a   Ristein, J ^a   Neubauer, J ^a   Gobbels M ^a   Ley, L ^a  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

Diamond growth and characterization; HF CVD; Homoepitaxy; Luminescene

Indexed keywords

CHEMICAL VAPOR DEPOSITION; IMPURITIES; PHOTOLUMINESCENCE; SILICON; SPECTROSCOPIC ANALYSIS; SURFACE ROUGHNESS; X RAY DIFFRACTION;

GROWTH RATES;

DIAMONDS;

DIAMOND; FILM;

EID: 0036508396     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(01)00627-6     Document Type: Article

References (16)