Gas adsorption characteristics of MgO films for PDP deposited under oxygen atmosphere

Shinku/Journal of the Vacuum Society of Japan

Volumn 43, Issue 10, 2000, Pages 973-977

  Sawada, Takao ^a   Watanabe, Keiji ^b   Fukuyama, Keiji ^a   Ohira, Takuya ^a   Kinugawa, Masaru ^a   Sano, Ko ^a  

^a MITSUBISHI ELECTRIC CORPORATION   (Japan)

^b Elevam Corporation   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLIZATION; DEPOSITION; FILM GROWTH; FILMS; GAS ADSORPTION; MAGNESIA; PARTIAL PRESSURE; PRESSURE EFFECTS; REFRACTIVE INDEX; SECONDARY EMISSION;

ELECTRON BEAM EVAPORATION; OXYGEN PARTIAL PRESSURE;

PLASMA DISPLAY DEVICES;

EID: 0034504273     PISSN: 05598516     EISSN: None     Source Type: Journal    
DOI: 10.3131/jvsj.43.973     Document Type: Article

References (6)

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3. S. Hidaka, M. Ishimoto, N. Iwase, K. betsui and H. Inoue: Proc. 5th. Int. Display. Workshops, kobe, Japan, 1998, PP523-526
4. Japanese source
5. Japanese source
6. Japanese source