Ion energy distribution functions and Langmuir probe measurements in low pressure argon discharges

Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 20, Issue 2, 2002, Pages 526-529

  Kaeppelin, V ^a   Carrere M ^a   Layet, J M ^a  

^a AIX MARSEILLE UNIVERSITÉ   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; DIFFUSION IN GASES; ELECTROMAGNETIC WAVE PROPAGATION; HELICONS; ION SOURCES; IONIZATION OF GASES; PLASMA COLLISION PROCESSES; PLASMA DENSITY; PRESSURE EFFECTS;

ENERGETIC IONS; ION ENERGY DISTRIBUTION FUNCTIONS (IEDF); PRESSURE GRADIENTS;

PLASMA SOURCES;

EID: 0036494322     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1451274     Document Type: Article

References (10)