Selective area MOVPE growth of two-dimensional photonic crystals having an air-hole array and its application to air-bridge-type structures

Physica E: Low-Dimensional Systems and Nanostructures

Volumn 13, Issue 2-4, 2002, Pages 446-450

  Akabori, Masashi ^a   Takeda, Junichiro ^a   Motohisa, Junichi ^a   Fukui, Takashi ^a  

^a HOKKAIDO UNIVERSITY   (Japan)

Author keywords

GaAs(1 1 1)B masked substrates; Hexagonal air hole array; Selective area metal organic vapor phase epitaxy (SA MOVPE); Two dimensional photonic crystal (2DPC)

Indexed keywords

DRY ETCHING; MASKS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; SPONTANEOUS EMISSION; SUBSTRATES;

PHOTONIC CRYSTALS (PC);

EPITAXIAL GROWTH;

EID: 0036492665     PISSN: 13869477     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1386-9477(02)00158-3     Document Type: Conference Paper

References (7)