Preparation and characterization of SiO2-B2O3-P2O5 particles and films generated by flame hydrolysis deposition for planar light-wave circuits

Journal of Materials Research

Volumn 17, Issue 2, 2002, Pages 315-322

  Shin, Hyungsoo ^a   Yi, Ji Hyun ^a   Baek, Jong Gab ^a   Choi, Mansoo ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

BOROPHOSPHATE GLASS; DEPOSITION; DOPING (ADDITIVES); HYDROLYSIS; OPTICAL FILMS; PARTICLES (PARTICULATE MATTER); SILICON WAFERS; SUBSTRATES; SYNTHESIS (CHEMICAL);

FLAME HYDROLYSIS; PLANAR LIGHT-WAVE CIRCUITS;

BOROSILICATE GLASS;

EID: 0036477720     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.2002.0045     Document Type: Article

References (26)