Characterization of borophosphosilicate glass soot fabricated by flame hydrolysis deposition for silica-on-silicon device applications

Journal of Materials Science

Volumn 34, Issue 24, 1999, Pages 6035-6040

  Choi, Choon Gi ^a   Jeong, Myung Yung ^a   Choy, Tae Goo ^a  

^a Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

BORON COMPOUNDS; DENSIFICATION; DEPOSITION; FUSED SILICA; HYDROLYSIS; LIGHT ABSORPTION; POROUS MATERIALS; SEMICONDUCTING SILICON; SINTERING; SYNTHESIS (CHEMICAL);

BOROPHOSPHOSILICATE GLASS; FLAME HYDROLYSIS DEPOSITION; SILICA-ON-SILICON DEVICE;

BOROSILICATE GLASS;

EID: 0033324068     PISSN: 00222461     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1004797231932     Document Type: Article

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