Dynamic release control policy for the semiconductor wafer fabrication lines

Journal of the Operational Research Society

Volumn 47, Issue 12, 1996, Pages 1516-1525

  Kim, Jongsoo ^a   Leachman, Robert C ^b   Suh, Byungkyoo ^a  

^a Hanyang University   (South Korea)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Release control; Semiconductor fabrication

Indexed keywords

DECISION MAKING; FAILURE (MECHANICAL); MACHINERY; OPTIMIZATION; PROCESS CONTROL; PRODUCTIVITY; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS;

DYNAMIC RELEASE CONTROL POLICY; SEMICONDUCTOR WAFER FABRICATION LINES;

SCHEDULING;

EID: 0030407745     PISSN: 01605682     EISSN: 14769360     Source Type: Journal    
DOI: 10.1057/jors.1996.195     Document Type: Article

References (9)

1. P. B. Chevalier and L. M. Wein (1993) Scheduling networks of queues: heavy traffic analysis of a multistation closed network. Opns Res. 41, 742-758.
2. R. C. GLASSEY and M. G. C. RESENDE (1988) Closed-loop release control for VLSI circuit manufacturing. IEEE Transactions on Semiconductor Manufacturing 1, 36-46.
3. R. C. Leachman, M. G. Solorzano and C. R. Glassey (1990) A queue management policy for the release of factory work orders. Presented at the First Symposium on Semiconductor Factory Management Systems, Texas AM University, College Station, USA, November 1990.
4. W. Bechte (1988) Theory and practice of load-oriented manufacturing control. Int. J. Prod. Res. 26, 375-395.
5. G. L. Ragats and V. A. Mabert (1988) An evaluation of order release mechanism in a job-shop environment. Decis. Sci. 19, 167-189.
6. M. G. Solorzano (1989) Workload regulation of semiconductor fabrication facilities. ESRC Report 89-1, University of California, Berkeley, USA.
7. L. M. Wein (1992) Scheduling networks of queues: heavy traffic analysis of a multistation network and controllable inputs. Opns Res. 40, S312-S334.
8. L. M. Wein (1988) Scheduling semiconductor wafer fabrication. IEEE Transactions on Semiconductor Manufacturing 1, 115-130.
9. J. W. Lawton (1990) Wafer release in a GaAs environment. MSc. Thesis, Sloan School of Management, MIT, Cambridge, USA.