Defect interaction by dual MeV ion implantation in silicon

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 187, Issue 2, 2002, Pages 215-219

  Ro, Jae Sang ^a   Cho, Nam Hoon ^a  

^a Hong Ik University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTAL DEFECTS; SEMICONDUCTING SILICON; SILICON WAFERS; STRAIN; X RAY DIFFRACTION ANALYSIS;

ION-INDUCED DEFECTS;

ION IMPLANTATION;

EID: 0036467185     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(01)00938-7     Document Type: Article

References (5)