Frequency selective surfaces enable MEMS gas sensor

Materials Research Society Symposium - Proceedings

Volumn 722, Issue , 2002, Pages 395-400

  Puscasu, Irina ^a   Pralle, Martin U ^a   McNeal, Mark P ^a   Moelders, Nicholas ^a   Last, Lisa ^a   Ho, William ^a   Greenwald, Anton C ^a   Daly, James T ^a   Johnson, Edward A ^a   El Kady, Ihab ^b   Biswas, Rana ^b  

^a Ion Optics Inc   (United States)

^b IOWA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; CARBON DIOXIDE; CHEMICAL SENSORS; ETCHING; METALLIC FILMS; POLLUTION;

PHOTONIC CRYSTALS (PC);

MICROELECTROMECHANICAL DEVICES;

EID: 0036458311     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-722-l3.4     Document Type: Conference Paper

References (7)

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4. I. Puscasu, W.L., Schaich, and G.D. Boreman, "Modeling Parameters for the Spectral Behavior of Infrared Frequency-Selective Surfaces," App. Opt., 40 (1), pp. 118-124, 2001.
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