Correlation of microwave dielectric properties and microstructure of unpatterned ferroelectric thin films

Materials Research Society Symposium - Proceedings

Volumn 720, Issue , 2002, Pages 123-128

  Geyer, R G ^a   Cole, M W ^b   Joshi, P C ^b   Ngo, E ^b   Hubbard, C ^b   Nothwang, W ^b   Bratcher, M ^b   Ervin, M ^b   Wood, M ^b  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b U S ARMY RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CAPACITORS; DEPOSITION; DIELECTRIC LOSSES; DOPING (ADDITIVES); FERROELECTRIC MATERIALS; LEAKAGE CURRENTS; MICROSTRUCTURE; MICROWAVE DEVICES;

MICROWAVE TUNABLE DEVICES;

THIN FILMS;

EID: 0036458164     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-720-h4.3     Document Type: Conference Paper

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