Thermal management of BioMEMS

Thermomechanical Phenomena in Electronic Systems -Proceedings of the Intersociety Conference

Volumn , Issue , 2002, Pages 1025-1032

  Sadler, Daniel J ^a   Changrani, Rajnish ^a   Roberts, Peter ^a   Chou, Chia Fu ^a   Zenhausern, Frederic ^a  

^a MOTOROLA INC   (United States)

Author keywords

BioMEMS; Feedback control; MEMS; Microfluidic; Microsystems; Thermal fluidic

Indexed keywords

CLOSED LOOP CONTROL SYSTEMS; FEEDBACK CONTROL; FINITE ELEMENT METHOD; OPTIMIZATION; SILICON; TRANSISTORS;

MICROFLUIDIC DEVICES;

MICROELECTROMECHANICAL DEVICES;

EID: 0036457972     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)

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