Nanostructuring in submicron-level waveguides with femtosecond laser pulses

Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

Volumn , Issue , 2002, Pages 659-660

  Li, Ming ^a   Ishizuka, Makoto ^a   Liu, Xinbing ^a   Sugimoto, Yoshimasa ^b   Ikeda, Naoki ^b   Asakawa, Kiyoshi ^b  

^a Panasonic Boston Lab   (United States)

^b WASEDA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE COUPLED DEVICES; ELECTRON BEAM LITHOGRAPHY; LASER PULSES; LIGHT POLARIZATION; MICROMACHINING; SILICON; SINGLE CRYSTALS;

FEMTOSECOND LASERS;

WAVEGUIDES;

EID: 0036457507     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)

1. M. Li and X. Liu, Japanese Journal of Applied Physics, in press; M. Li and X. Liu, FST 2000, Tsukuba, JAPAN, 2000.
2. J.S. Foresi et al., Nature, 390, 143 (1997).