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Volumn 4905, Issue , 2002, Pages 161-164
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Low threshold DFB laser integrated high speed EA modulators based on ridge waveguide structure by ICP etching
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Author keywords
Inductively Coupled Plasma Etching; Laser Integrated EA Modulator; Optimization of Wavelength Detuning
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Indexed keywords
BANDWIDTH;
INDUCTIVELY COUPLED PLASMA;
LIGHT ABSORPTION;
LIGHT MODULATORS;
OPTICAL COMMUNICATION;
OPTICAL WAVEGUIDES;
PLASMA ETCHING;
ELECTROABSORPTION (EA) MODULATORS;
DISTRIBUTED FEEDBACK LASERS;
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EID: 0036457047
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.480999 Document Type: Conference Paper |
Times cited : (3)
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References (4)
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