Influence of substrate surface morphology on defect generation during silicon carbide single crystal growth

Materials Research Society Symposium - Proceedings

Volumn 719, Issue , 2002, Pages 35-40

  Um, Myung Yoon ^a   Jeong, Jae Kyeong ^a   Kim, Bum Seok ^a   Na, Hoon Joo ^a   Song, In Bok ^a   Kim, Hyeong Joon ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTAL GROWTH; ETCHING; SCANNING ELECTRON MICROSCOPY; SILICON CARBIDE;

DEFECT GENERATION; PHYSICAL VAPOR TRANSPORT;

SINGLE CRYSTALS;

EID: 0036454310     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-719-f8.12     Document Type: Conference Paper

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