Trapping and detrapping of H in Si: Impact on diffusion properties and solar cell processing

Materials Research Society Symposium - Proceedings

Volumn 719, Issue , 2002, Pages 125-131

  Sopori, Bhushan ^a   Zhang, Y ^a   Reedy, R ^a   Jones, K ^a   Ravindra, N M ^b   Rangan, S ^c   Ashok, S ^c  

^a NATIONAL RENEWABLE ENERGY LABORATORY   (United States)

^b NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

^c PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSION; HYDROGEN; ION IMPLANTATION; MOS DEVICES; SOLAR CELLS;

MATERIAL PROPERTIES;

SILICON;

EID: 0036447879     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-719-f5.3     Document Type: Conference Paper

References (21)

1. P. Sana, A. Rohatgi, J. Kalejs and R.O. Bell, Appl. Phys. Lett. 64, 111 (1994).
2. J.T. Borenstein, J.W. Corbett and S.J. Pearton, J. Appl. Phys. 73, 2751 (1993).
3. M. Capizzi and A. Mittiga, Physica 146B, 19 (1987).
4. D. Mathiot, Phys. Rev. B 40, 5867 (1989).
5. J.P. Kalejs and S. Rajendran, App. Phys. Lett. 55, 25 (1989).
6. J.T. Borenstein, D. Tulchinski and J.W. Corbett, Mat. Res. Soc. Symp. Proc. 163, 633 (1990).
7. R. Rizk, P. de Mierry, D. Ballutaud, M. Aucouturier, and D. Mathiot, Phys. Rev. B 44, 6141 (1991).
8. Y. Zhang, Ph.D. Thesis, "Modeling Hydrogen Diffusion for Solar Cell Passivation and Process Optimization," New Jersey Institute of Technology, 2002.
9. B.L. Sopori, and Y. Zhang, AIP Conf. Procd, NCPV Review Meeting, Oct. 14-17, 2001, Lakewood, CO.
10. A. Van Wieringen and N. Warmholtz, Physica 22, 849 (1956).
11. W.L. Hansen, S.J. Pearton, and, E.E. Haller, Appl. Phys. Lett. 44, 606 (1984).
12. A. Mogro-Campero, R.P. Love, and R. Schubert, J. Electrochem. Soc. 132, 2006 (1985).
13. N.M. Johnson and C. Herring, and D.J. Chadi, Phys. Rev. Lett. 56, 769 (1986).
14. N.M. Johnson and C. Herring, Inst. Phys. Conf. Ser. 95, 415 (1989).
15. T. Ichimiya, and A. Furuichi, Int. J. Appl. Rad. Isotopes 19, 573 (1968).
16. N.M. Johnson and M.B. Moyer, Appl. Phys. Lett. 46, 787 (1985).
17. M. Capizzi and A. Mittiga, Appl. Phys. Lett. 50, 918 (1987).
18. C.H. Seager and R.A. Anderson, Appl. Phys. Lett. 53, 1181 (1988).
19. B.L. Sopori, Kim Jones and Xiao Jun Deng, Appl. Phys. Lett. 61, 2560 (1992).
20. B.L. Sopori, Y. Zhang, and N.M. Ravindra, J. Elec. Mat, 30, 1616 (2001).
21. B.Y. Tong, X.W. Wu, G.R. Yang and S.K. Wong, Can. J. Phys. 67, 379 (1989).