On the optical quality of NCLR's 1 kW, 1 kHz XeCl excimer laser

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3889, Issue , 2000, Pages 388-395

  Hofstra, Ramon M ^a   Timmermans, John C M ^a   van Heel, Huub J G ^a  

^a Nederlands Centrum voor Laser Research BV   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMAGNETIC WAVE DIFFRACTION; GAS LASERS; LASER BEAMS; LASER MODES; LASER OPTICS; OPTICAL RESONATORS;

POINTING VARIATION; XENON CHLORIDE LASERS;

EXCIMER LASERS;

EID: 0033878328     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.380908     Document Type: Conference Paper

References (13)