Processing of semiconductors with femtosecond lasers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4760, Issue I, 2002, Pages 326-334

  Tonshoff H K ^a   Ostendorf, A ^a   Barsch N ^a  

^a LASER ZENTRUM HANNOVER E V   (Germany)

Author keywords

Femtosecond; Laser; Semiconductors

Indexed keywords

COMPOSITE MICROMECHANICS; LASER ABLATION; LASER PULSES; MICROELECTRONICS; ULTRAFAST PHENOMENA;

FEMTOSECOND LASERS;

SEMICONDUCTOR MATERIALS;

EID: 0036442709     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.482102     Document Type: Conference Paper

References (13)

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