Deposition of nano-crystalline diamond films by excimer laser ablation of carbon

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4915, Issue , 2002, Pages 218-221

  Zhao, Qingxun ^a   Dong, Lifang ^a   Fu, Guangsheng ^a   Shang, Yong ^a   Wang, Yinshun ^a   Wang, Yongjie ^a  

^a HEBEI UNIVERSITY   (China)

Author keywords

Chemical vapor deposition; Diamond films; Laser ablation

Indexed keywords

CARBON; CHEMICAL VAPOR DEPOSITION; EXCIMER LASERS; HYDROGEN; LASER ABLATION; METHANE; NANOSTRUCTURED MATERIALS; RAMAN SCATTERING; TEMPERATURE; X RAY DIFFRACTION ANALYSIS;

ELECTRON ASSISTED CHEMICAL VAPOR DEPOSITION; NANOCRYSTALLINE DIAMOND FILMS;

DIAMOND FILMS;

EID: 0036438276     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.482889     Document Type: Conference Paper

References (9)

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