Application of laser-induced breakdown spectroscopy to the analysis of the composition of thin films produced by pulsed laser deposition

Applied Surface Science

Volumn 197-198, Issue , 2002, Pages 217-223

  Aragon C ^a   Madurga, V ^a   Aguilera, J A ^a  

^a PUBLIC UNIVERSITY OF NAVARRE   (Spain)

Author keywords

Laser plasma; Laser induced breakdown spectroscopy; Pulsed laser deposition; Thin films

Indexed keywords

COMPOSITION; LASER ABLATION; LASER PRODUCED PLASMAS; PULSED LASER DEPOSITION; SPECTROSCOPIC ANALYSIS; STOICHIOMETRY; THIN FILMS;

LASER-INDUCED BREAKDOWN SPECTROSCOPY;

SURFACE STRUCTURE;

EID: 0036435677     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(02)00368-9     Document Type: Conference Paper

References (17)

1. Arnold C.B., Aziz M.J. Appl. Phys. A 69 1999 S23.
2. van Ingen R.P., Fastenau R.H.J., Mittemeijer E.J. J. Appl. Phys. 76 1994 1871.
3. Radziemsky L.J. Microchem. J. 50 1994 218.
4. Rusak D.A., Castle B.C., Smith B.W., Winefordner J.D. Cr. Rev. Anal. Chem. 27 1997 257.
5. Song K., Lee Y.-I., Sneddon J. Appl. Spectrosc. Rev. 32 1997 183.
6. Anderson D.R., McLeod C.W., English T., Trevor Smith A. Appl. Spectrosc. 49 1995 691.
7. St-Onge L., Sabsabi M. Spectrochim. Acta, Part B 55 2000 299.
8. Vadillo J.M., Palanco S., Romero M.D., Laserna J.J. Fresen. J. Anal. Chem. 355 1996 909.
9. Preuss S., Matthias E., Stuke M. Appl. Phys. A 59 1994 79.
10. Rosenfeld A., Campbell E.E.B. Appl. Surf. Sci. 96-98 1996 439.
11. Le Drogoff B., Vidal F., Von Kaenel Y., Chaker M., Johnston T.W., Laville S., Sabsabi M., Margot J. J. Appl. Phys. 89 2001 8247.
12. Aguilera J.A., Aragón C., Peñalba F. Appl. Surf. Sci. 127-129 1998 309.
13. Aragón C., Bengoechea J., Aguilera J.A. Spectrochim. Acta, Part B 56 2001 619.
14. NIST Atomic Spectra Database, http://physics.nist.gov.
15. Aguilera J.A., Aragón C. Appl. Phys. A 69 1999 S475.
16. Aragón C., Aguilera J.A., Peñalba F. Appl. Spectrosc. 53 1999 1259.
17. A. Thorne, U. Litzén, S. Johansson, Spectrophysics: Principles and Applications, Springer, Berlin, 1999.