Magnetic field assisted increase of growth rate and reduction of particulate incorporation in pulsed laser deposited boron nitride films

Applied Surface Science

Volumn 197-198, Issue , 2002, Pages 494-498

  Weißmantel, Steffen ^a   Rost, Dirk ^a   Reiße, Günter ^a  

^a UNIVERSITY OF APPLIED SCIENCES MITTWEIDA   (Germany)

Author keywords

Boron nitride films; Magnetic field; Particulates; Pulsed laser ablation

Indexed keywords

CUBIC BORON NITRIDE; FILM GROWTH; LASER PULSES; MAGNETIC FIELD EFFECTS; PARTICLES (PARTICULATE MATTER); PULSED LASER DEPOSITION;

LASER PULSE ENERGIES;

SURFACE PHENOMENA;

EID: 0036434188     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(02)00324-0     Document Type: Conference Paper

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