Laser crystallisation during pulsed laser deposition of barium titanate thin films at low temperatures

Applied Surface Science

Volumn 197-198, Issue , 2002, Pages 831-838

  Gottmann, J ^a   Vosseler, B ^a   Kreutz, E W ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

Barium titanate; In situ laser annealing; Laser crystallisation; Pulsed laser deposition

Indexed keywords

ANNEALING; CRYSTALLIZATION; DIELECTRIC FILMS; DYNAMIC RANDOM ACCESS STORAGE; FERROELECTRICITY; LOW TEMPERATURE EFFECTS; MICROELECTRONICS; PERMITTIVITY; PHOTOEMISSION; PULSED LASER DEPOSITION; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; TEMPERATURE DISTRIBUTION; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

LASER CRYSTALLIZATION;

BARIUM TITANATE;

EID: 0036426183     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(02)00457-9     Document Type: Conference Paper

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