Reduction of reflective notching through illumination optimization

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4691 II, Issue , 2002, Pages 990-998

  Word, James ^a   Chou, Dyiann ^a   Gu, Yiming ^a   Sturtevant, John ^a  

^a Integrated Device Technology   (United States)

Author keywords

BARC; Reflective notching; Swing curve

Indexed keywords

ANTIREFLECTION COATINGS; DYEING; LIGHTING; OPTIMIZATION;

REFLECTIVE NOTCHING;

PHOTORESISTS;

EID: 0036416638     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.474566     Document Type: Article

References (6)

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2. Thiloma Perara, "Antireflective Coatings - An Overview," Solid State Technology, July 1995.
3. Stephen J. Buffat "A Non-ARC Solution to Metal Reflective Notching; Its Evaluation and Selection," SPIE Vol. 3051, 1997.
4. Chris A. Mack, "The Effect of Numerical Aperture and Partial Coherence on Swing Curves," Microlithography World, Volume 6, Number 4, Autumn 1997.
5. T.A. Brunner, "Optimization of Optical Properties of Resist," SPIE Vol. 1466, 1991.
6. Robert Socha, Chris Progler, Andrew Neureuther, "The Effect of Partial Coherence on Reflective Notching", SPIE Vol. 3051, 1997.