|
|
|
Volumn 6, Issue 4, 1997, Pages 21-22
|
|
The effect of numerical aperture and partial coherence on swing curves
|
|
Author keywords
[No Author keywords available]
|
|
Indexed keywords
ANTIREFLECTION COATINGS;
COHERENT LIGHT;
LIGHT POLARIZATION;
MASKS;
PHOTOLITHOGRAPHY;
REFRACTIVE INDEX;
INCIDENT LIGHT ANGLES;
SWING CURVES;
PHOTORESISTS;
|
|
EID: 0031222068
PISSN: 1074407X
EISSN: None
Source Type: Trade Journal
DOI: None Document Type: Article |
|
Times cited : (6)
|
|
References (0)
|
