Discussion of ways to energy-filter the electron backscattering pattern (EBSP) in the scanning electron microscope (SEM)

Microscopy and Microanalysis

Volumn 8, Issue SUPPL. 2, 2002, Pages 106-107

  Wells, Oliver C ^a  

^a IBM RESEARCH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0036409185     PISSN: 14319276     EISSN: None     Source Type: Journal    
DOI: 10.1017/s1431927602102042     Document Type: Conference Paper

References (11)

1. L. Reimer, Scanning Electron Microscopy, Physics of Image Formation and Microanalysis, Springer-Verlag, 1985.
2. L. Reimer, Private communication: "...scattering is more likely to occur into a favorable direction than into an unfavorable one..." 1994.
3. nd. Ann. Mtg. MSA, (1994) 592.
4. O.C. Wells, Scanning 21 (1999) 368.
5. ECP with a retarding-field energy filter: E.D. Wolf, P.J. Coane and T.E. Everhart, Cong. Int. Micro. Electron., Grenoble, 2, (1970) 595.
6. RHEED pattern with a retarding-field energy filter: staib-us@staib-instruments.com
7. O.C. Wells and E. Munro, Ultramicroscopy 47 (1992) 101.
8. O.C. Wells, F.K. LeGoues and R.T. Hodgson, Appl. Phys. Lett. 56 (1990) 2351.
9. O.C. Wells, E. Munro and I.M. Fisher, Inst. Phys. Conf. Series No. 119, Section 5 (EMAG91), (1991) 181.
10. O.C. Wells, Proc. ALC'01 (Nara, Japan, Nov. 2001) in press, 2002.
11. I would like to thank P.E. Batson, J. Del Vecchio, D.J. Dingley, L. Dylla, R. von Gutfeld, M. Kammler, D.E. Newbury, J.R. Michael, M.T. Postek and R.M. Tromp for helpful discussions.